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Software Catalogue
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- OPTICS
- For Computing Optical Properties of Electron and Ion Beam Columns
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- PROJECTION
- For the Design and Optimisation of Electron and Ion Beam Projection Systems
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- TOLERANCE
- For Computing Tolerancing Errors in Electron and Ion Beam Columns
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- DYNAMIC
- For Computing Effects of Dynamic Correction Elements in Electron and Ion Beam Columns
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- REFINE
- For Interactive Optimization of Electron and Ion Beam Columns
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- SOURCE
- For Simulation and Design of Electron and Ion Sources
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- MECH
- For Mechanical Tolerancing of Electron Lenses
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- BOERSCH
- Compute Discrete Coulomb Interaction Effects
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- 3D
- 3D Combined Field and raytracing Software
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- WAVE
- Wave Optical Analysis of Spot Current Density
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- SOFEM
- Second-Order Finite Element Method Software
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- ABER-5
- For Computing 5th-Order Aberrations of Electron and Ion Beam Columns
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