About MEBS
Munro's Electron Beam Software Ltd. ("MEBS") is a company based in London, England. MEBS is run jointly by Eric Munro, Xieqing Zhu, John Rouse, Haoning Liu and Liping Wang. We jointly have over 100 person-years of expertise in electron optical design.
Eric Munro’s experience in electron optics dates back to
the 1960's when he pioneered the use of finite element methods in electron
optics. His electron lens design software has been used by most electron
microscope manufacturers worldwide.
Xieqing
Zhu is an expert on aberration theory, second-order finite element methods and
the computer modelling of electron sources.
Xieqing retired in October 2004, but he still advises
us on many aspects of electron optics theory and design.
John Rouse obtained his PhD in electron optical design in 1991, and has
wide experience in three-dimensional field modelling and ray tracing in electron
optics. Haoning Liu is skilled in tolerancing theory of complete optical columns
and is currently writing related software tools at MEBS.
On a scientific level, we’ve contributed to many aspects
of the development of the subject, including the aberration theory of general
combinations of electron lenses and deflectors, multipole systems, electron
guns, discrete Coulomb interaction effects, asymmetry aberrations and
tolerancing, and the analysis of fully three-dimensional fields and
trajectories. We have applied these techniques to the design of a diverse range
of instruments and components, including electron microscopes, lithography
machines, e-beam testing systems, CRTs, photomultiplier tubes, e-beam welding
guns, focused ion beam systems (including multipole aberration correctors) and
microwave tubes. We have acted as
scientific consultants to many electron optical equipment manufacturers in
Much of our time is spent writing software, both as contracts in response to requests from clients and also to build up a range of software tools for general applications in electron optical design.
Our software is developed on PCs and has been configured to run on most systems, including PCs, Apple Macs and UNIX Workstations. We aim to provide state-of-the-art design tools in the most convenient environment, so as to maximise the designer's productivity and creativity.
Because of the specialised nature of electron optical design, our philosophy is to provide a customised service to meet the needs of individual clients. We are happy to discuss specific requirements and to provide expert guidance, specialised software and support.
Dr.
Eric Munro
Tel:
(+ 44) - 20 - 7581 – 4479
Munro’s Electron Beam Software Ltd.
Fax: (+ 44) - 20 -
7581 – 4479
14 Cornwall Gardens
London SW7 4AN
e-mail:
admin@mebs.co.uk
England
URL: www.mebs.co.uk